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Our mission is to delight our customers by providing enabling thin film competitive advantages. We are totally committed to high-productivity and enabling thin film solutions, with best-in-class service and support. We work to provide our customers with new competitive capabilities and manufacturing processes uniquely tailored for their needs.
We are driven to be...

An Enabling Thin Film Equipment Company™

Established in 1981, Genus, Inc. designs, manufactures and markets capital equipment and deposition processes for advanced semiconductor manufacturing as well as for other, emerging non-semiconductor applications.

We offer various thin film deposition modules with our own production-proven platform- the LYNX2® for 200mm wafers and, the LYNX3™ for 300mm wafers. These systems deliver processes for chemical vapor deposition (CVD). Our atomic layer deposition (ALD) solution of conducting (metal) or insulating (dielectric) materials are available with our StrataGem family of products.

Our core business was in the area of tungsten-based thin films used in the development and manufacture of memory modules (DRAM) in the semiconductor industry. However our ALD technology has gained attention and acceptance within and beyond the semiconductor industry. With precise control capabilities and conformal step coverage of difficult high-aspect ratios, our ALD technology promises to enable near-and next-generation geometries that continue to shrink in both the semiconductor world and other industries.

In mid-2000, the company expanded marketing efforts for our ALD technology to new customers for a variety of applications beyond the memory segment of the semiconductor industry. By Q1 2001, we achieved penetration of the data storage industry for gap dielectric applications in disk drive recording heads. Additionally, we received purchase orders for ALD systems for use in logic gate applications for both 200mm and 300mm platforms. See the Markets section for further discussion on the potential of our ALD technology.

The company is headquartered in Sunnyvale, California (Silicon Valley), with service offices in Korea, Japan and Taiwan, and sales offices worldwide.

 
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