Markets - Non-Semiconductor

SEMICONDUCTOR    NON-SEMICONDUCTOR

In mid-2000, Genus announced its marketing strategy for non-semiconductor applications for its atomic layer deposition (ALD) technology, believing that a host of emerging non-semiconductor markets exists for ALD products. We estimate the market for ALD tools for non-semiconductor applications to be approximately $60 million to $120 million in the near term.

A variety of technologies and products in non-semiconductor market segments can benefit from the superior properties of ALD films. These properties include:

• Robust unmatched conformality even over the toughest topologies such as 30:1 high-aspect ratios and aggressive structures such as inner wall of a cavity;
• Ability to deposit controllable and repeatable films as thin as 4 or 5 angstroms; and
• Excellent electrical performance demonstrating high break-down voltage.

Aluminum oxide (Al₂O₃) is a popular, multi-purpose material that Genus has developed into a mature technology. Specific and immediate applications for our ALD technology, including potential new markets, are mentioned below.

Data Storage / Thin-Film Magnetic Heads
Genus is currently providing ALD technology for advanced sensor element gap applications. A gap is a tiny feature of electromagnetic recording heads. Recording heads are miniature (about 1mm²) components that function to read and write information to and from a hard-drive disk or another storage medium. Building the gap structure requires extremely dense, pinhole free and uniform films. The low temperature (200°C) deposition technology available from Genus is a direct and qualified replacement for established sputtering based processes, which are unable to satisfy current and future requirements. Beyond the gap application, Genus is also working to qualify tools and technology for emerging "spin tunneling" and isolation requirements under development at leading thin-film head manufacturers.

OLED Micro-displays
Organic Light Emitting Diode (OLED) displays are an emerging technology positioned as a low cost, high performance alternative to conventional flat panel displays. Early adaptation and use of this technology is seen in microdisplays used in consumer electronics such as PDA's, cell phones and digital cameras.

MRAM
MRAM (Magnetoresistive Random Access Memory) is an emerging non-volatile solid-state memory technology, which utilizes magnetism to read and write data. A silicon-based technology MRAM offers the speed of SRAM (static RAM) and the density of DRAM (dynamic RAM). The key magnetic element in this type of device is the Magnetic Tunnel Junction (MTJ), which requires an ultra thin (<20Å), continuous and uniform dielectric film such as Al₂O₃.

Optoelectronics
Optical multiplexing and laser diodes are critical to expanding the bandwidth of fiber optic telecommunications. These applications require tool sets capable of ultra precise compositional control and uniformity on deposited materials. Genus' ALD technology may find applications for easily meets these requirements.

MEMS
MEMS (MicroElectroMechanical Systems) are a class of systems that are physically very small and have both electrical and mechanical components. MEMS range in size from micrometers to millimeters and include accelerometers, pressure sensors, microvalves, relays, optical fiber switches and many more devices. Genus' ALD technology, with its robust conformality, can provide enabling advantages to the MEMS industry.

Inkjet Printing Devices
The conformality enabled by Genus' ALD technology may be applied to the inkjet nozzle component in the manufacture of these printing devices. A wear resistant coating such as aluminum oxide may be deposited using Genus' ALD process.