Genus Secures Follow-on Orders From Major DRAM Manufacturer
for 200 mm and 300 mm ALD Systems

SUNNYVALE, Calif.-April 3, 2003- Genus, Inc. (NASDAQ : GGNS), a leader in advanced thin film deposition equipment used to manufacture semiconductor and data storage devices, announced today follow-on orders for its 200 mm and 300 mm atomic layer deposition (ALD) systems from a major DRAM manufacturer. The repeat business includes orders for Genus' StrataGem200 and StrataGem300 ALD systems.

Genus ALD systems are currently in production at the customer's sites, and the additional tools will provide increased DRAM production capacity along with previously installed Genus 200 mm LYNX2 and 300 mm LYNX3 chemical vapor deposition (CVD) systems.

"These follow-on orders again show Genus' leadership in both 200 mm and 300 mm ALD production systems," said Bill Elder, CEO of Genus, Inc. "Along with our established line of CVD systems, these ALD systems are the latest in a series of successful orders for Genus."

"We have a long and successful relationship with this leading DRAM manufacturer," said Werner Rust, executive vice president of global sales and marketing. "They are the largest DRAM manufacturer in the world, and it is our goal to provide the ALD and CVD technology leadership that they require in order to meet their aggressive development and production roadmap."

StrataGem200 and StrataGem300 systems provide production-worthy ALD for processing 200 mm and 300 mm wafers.

About Genus
Genus, Inc. manufactures critical deposition processing products for the global semiconductor industry and the data storage industry. To enable the production of intricate micro-computer chips and electronic storage devices, Genus offers its LYNX and StrataGem series of production-proven equipment for 200 mm and 300 mm semiconductor production, and offers thin film deposition products for chemical vapor deposition (CVD), atomic layer deposition (ALD), and pre-clean capabilities. Genus is at the forefront of market and technology developments in the ALD marketplace, which is gaining acceptance worldwide as a critical technology for sub-0.13-micron production of computer chips and electronic storage devices. Genus' customers include semiconductor manufacturers located throughout the United States, Europe and the Pacific Rim including Korea, Japan and Taiwan. Founded in 1981, the company is headquartered in Sunnyvale, California. For additional information visit Genus' web site at www.genus.com

NOTE: LYNX2®, LYNX3™ and StrataGem™ are trademarks of Genus, Inc

Forward-Looking Statements
This press release contains forward-looking statements regarding the company's future financial and business performance. These forward-looking statements are subject to a number of risks and uncertainties. These contingencies include but are not limited to: actual customer orders received by the company, the extent to which ALD technology is demanded by the marketplace, the actual number of customer orders received by the company, availability of components from suppliers, the timing of final acceptance of products by customers, the financial climate, accessibility to financing and fulfillment of closing conditions, general conditions in the thin film equipment market and in the macro-economy, and the influence of global political events. Genus assumes no obligation to update this information. Additional risks and uncertainties are discussed in the Management's Discussion and Analysis of Results of Operations contained in Genus' Annual Report on Form 10-K for the fiscal year ended December 31, 2001 and subsequent quarterly reports on Form 10-Q filed with the Securities and Exchange Commission.