LYNX3™

Genus introduced the LYNX3™ in January 1999 as our first 300mm low pressure CVD process module in a beta system.

The LYNX3 process module is based on a newly developed and patented process chamber concept that results in exceptional uniformity of the thin films. The LYNX3 is designed to run all films currently supported by the LYNX2, as well as all films currently in development. The LYNX3 system will support up to five process modules, which can be run serially or in parallel.

The next-generation software of the LYNX3 has enhanced features such as:

• Unmatched flexibility and functionality to meet challenging process needs and fast ramp-up requirements;
• Based on "ControlWorks" industry standard for OEM worldwide;
• Fully distributed "PC" based controls;
• Comprehensive process data storage; and
• Supports SEMI 300mm factory automation standards.

We are currently developing an advanced version of the LYNX3, which is designed to be a "bridge tool" capable of running either 200 or 300mm wafers.